검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Silicon nitride films deposited using ECR-PECVD technique for coating InGaAlAs high power laser facets Sah RE, Rinner F, Baumann H, Kiefer R, Mikulla M, Weimann G, Dammann M Journal of the Electrochemical Society, 150(7), F129, 2003 |
| 2 |
Reactive ion etching of GaN and GaAs: Radially uniform processes for rectangular, smooth sidewalls Franz G, Rinner F Journal of Vacuum Science & Technology A, 17(1), 56, 1999 |