검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Monitoring of Deposition and Dry-Etching of Si SiGe Multiple Stacks Tillack B, Richter HH, Ritter G, Wolff A, Morgenstern G, Eggs C Journal of Vacuum Science & Technology B, 14(1), 102, 1996 |
| No. | Article |
|---|---|
| 1 |
Monitoring of Deposition and Dry-Etching of Si SiGe Multiple Stacks Tillack B, Richter HH, Ritter G, Wolff A, Morgenstern G, Eggs C Journal of Vacuum Science & Technology B, 14(1), 102, 1996 |