검색결과 : 34건
| No. | Article |
|---|---|
| 1 |
Defect analysis for patterned media Ye ZM, Fretwell J, Luo K, Ha S, Schmid G, LaBrake D, Resnick DJ, Sreenivasan SV Journal of Vacuum Science & Technology B, 28(6), C6M7, 2010 |
| 2 |
Step and flash imprint lithography for manufacturing patterned media Schmid GM, Miller M, Brooks C, Khusnatdinov N, LaBrake D, Resnick DJ, Sreenivasan SV, Gauzner G, Lee K, Kuo D, Weller D, Yang XM Journal of Vacuum Science & Technology B, 27(2), 573, 2009 |
| 3 |
Full field imprint masks using variable shape beam pattern generators Selinidis K, Thompson E, Schmid G, Stacey N, Perez J, Maltabes J, Sreenivasan SV, Resnick DJ, Fujii A, Sakai Y, Sasaki S, Hayashi N Journal of Vacuum Science & Technology B, 26(6), 2410, 2008 |
| 4 |
Implementation of an imprint damascene process for interconnect fabrication Schmid GM, Stewart MD, Wetzel J, Palmieri F, Hao JJ, Nishimura Y, Jen K, Kim EK, Resnick DJ, Liddle JA, Willson CG Journal of Vacuum Science & Technology B, 24(3), 1283, 2006 |
| 5 |
Direct die-to-database electron beam inspection of fused silica imprint templates Resnick DJ, Myron LJ, Thompson E, Hasebe T, Tokumoto T, Yan C, Yamamoto M, Wakamori H, Inoue M, Ainley E, Nordquist KJ, Dauksher WJ Journal of Vacuum Science & Technology B, 24(6), 2979, 2006 |
| 6 |
Effects of etch barrier densification on step and flash imprint lithography Johnson S, Burns R, Kim EK, Dickey M, Schmid G, Meiring J, Burns S, Willson CG, Convey D, Wei Y, Fejes P, Gehoski K, Mancini D, Nordquist K, Dauksher WJ, Resnick DJ Journal of Vacuum Science & Technology B, 23(6), 2553, 2005 |
| 7 |
Image placement issues for ITO-based step and flash imprint lithography templates Nordquist KJ, Ainley ES, Mancini DP, Dauksher WJ, Gehoski KA, Baker J, Resnick DJ, Masnyj Z, Mangat PJS Journal of Vacuum Science & Technology B, 22(2), 695, 2004 |
| 8 |
Fabrication of a surface acoustic wave-based correlator using step-and-flash imprint lithography Cardinale GF, Skinner JL, Talin AA, Brocato RW, Palmer DW, Mancini DP, Dauksher WJ, Gehoski K, Le N, Nordquist KJ, Resnick DJ Journal of Vacuum Science & Technology B, 22(6), 3265, 2004 |
| 9 |
Inspection of templates for imprint lithography Hess HF, Pettibone D, Adler D, Bertsche K, Nordquist KJ, Mancini DP, Dauksher WJ, Resnick DJ Journal of Vacuum Science & Technology B, 22(6), 3300, 2004 |
| 10 |
Repair of step and flash imprint lithography templates Dauksher WJ, Nordquist KJ, Le NV, Gehoski KA, Mancini DP, Resnick DJ, Casoose L, Bozak R, White R, Csuy J, Lee D Journal of Vacuum Science & Technology B, 22(6), 3306, 2004 |