검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Developing a moving-coil actuator for nano-imprint lithography system Renn JC, Yang YA, Chan CS Materials Science Forum, 505-507, 1027, 2006 |
| No. | Article |
|---|---|
| 1 |
Developing a moving-coil actuator for nano-imprint lithography system Renn JC, Yang YA, Chan CS Materials Science Forum, 505-507, 1027, 2006 |