검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Application of deuterium exchange to analyze moisture uptake characteristics of porous low-dielectric-constant SiOCH films Vinogradova E, Smith CE, Mueller DW, Reidy RF Electrochemical and Solid State Letters, 11(9), H255, 2008 |
| 2 |
Effect of silylation on triethoxyfluorosilane xerogel films by means of atmospheric pressure drying Orozco-Teran RA, Gorman BP, Mueller DW, Baklanov MR, Reidy RF Thin Solid Films, 471(1-2), 145, 2005 |
| 3 |
Rapid repair of plasma ash damage in low-k dielectrics using supercritical CO2 Gorman BP, Orozco-Teran RA, Zhang Z, Matz PD, Mueller DW, Reidy RF Journal of Vacuum Science & Technology B, 22(3), 1210, 2004 |
| 4 |
Drying and functionalization of triethoxyfluorosilane-based low-k dielectrics in CO2 Gorman BP, Mueller DW, Reidy RF Electrochemical and Solid State Letters, 6(11), F40, 2003 |
| 5 |
Thermogravimetric Analysis of the Reaction of CeO2 with the NaVO3-SO3 System Reidy RF, Jones RL Journal of the Electrochemical Society, 142(4), 1353, 1995 |