검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
High selectivity Inductively Coupled Plasma etching of GaAs over InGaP Hays DC, Cho H, Lee JW, Devre MW, Reelfs BH, Johnson D, Sasserath JN, Meyer LC, Toussaint E, Ren F, Abernathy CR, Pearton SJ Applied Surface Science, 156(1-4), 76, 2000 |
| 2 |
Advanced selective dry etching of GaAs/AlGaAs in high density inductively coupled plasmas Lee JW, Devre MW, Reelfs BH, Johnson D, Sasserath JN, Clayton F, Hays D, Pearton SJ Journal of Vacuum Science & Technology A, 18(4), 1220, 2000 |