검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High fidelity blazed grating replication using nanoimprint lithography Chang CH, Montoya JC, Akilian M, Lapsa A, Heilmann RK, Schattenburg ML, Li M, Flanagan KA, Rasmussen AP, Seely JF, Laming JM, Kjornrattanawanich B, Goray LI Journal of Vacuum Science & Technology B, 22(6), 3260, 2004 |