화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Al2O3-SiO2 stack with enhanced reliability
Lisiansky M, Fenigstein A, Heiman A, Raskin Y, Roizin Y, Bartholomew L, Owyang J, Gladkikh A, Brener R, Geppert I, Lyakin E, Meyler B, Shnieder Y, Yofis S, Eizenberg M
Journal of Vacuum Science & Technology B, 27(1), 476, 2009
2 Protection of silicon wafers from alkali contamination during high-temperature processing using electric field
Beregovsky M, Klyuch A, Raskin Y, Zinman Y, Shacham-Diamand Y, Deal BE
Journal of the Electrochemical Society, 147(10), 3892, 2000