검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Investigation of surface roughening of low-k films during etching using fluorocarbon plasma beams Yin YP, Rasgon S, Sawin HH Journal of Vacuum Science & Technology B, 24(5), 2360, 2006 |
| 2 |
Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes Goldfarb DL, Mahorowala AP, Gallatin GM, Petrillo KE, Temple K, Angelopoulos M, Rasgon S, Sawin HH, Allen SD, Lawson MC, Kwong RW Journal of Vacuum Science & Technology B, 22(2), 647, 2004 |