검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Effect of plasma parameters on the amorphous to microcrystalline silicon transition Katsia E, Amanatides E, Mataras D, Rapakoulias DE Thin Solid Films, 511, 285, 2006 |
| 2 |
Combined effect of electrode gap and radio frequency on power deposition and film growth kinetics in SiH4/H-2 discharges Amanatides E, Mataras D, Rapakoulias DE Journal of Vacuum Science & Technology A, 20(1), 68, 2002 |
| 3 |
Deposition rate optimization in SiH4/H-2 PECVD of hydrogenated microcrystalline silicon Amanatides E, Mataras D, Rapakoulias DE Thin Solid Films, 383(1-2), 15, 2001 |
| 4 |
Kinetics of Power Deposition and Silane Dissociation in Radiofrequency Discharges Spiliopoulos N, Mataras D, Rapakoulias DE Journal of the Electrochemical Society, 144(2), 634, 1997 |
| 5 |
Power Dissipation and Impedance Measurements in Radiofrequency Discharges Spiliopoulos N, Mataras D, Rapakoulias DE Journal of Vacuum Science & Technology A, 14(5), 2757, 1996 |