검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Lithographic patterning of benzoylacetone modified SnO2 and SnO2 : Sb thin films Kololuoma T, Karkkainen AHO, Tolonen A, Rantala JT Thin Solid Films, 440(1-2), 184, 2003 |
| 2 |
Siloxane-based hybrid glass materials for binary and grayscale mask photoimaging Karkkainen AHO, Rantala JT, Maaninen A, Jabbour GE, Descour MR Advanced Materials, 14(7), 535, 2002 |
| 3 |
Novel synthesis route to conductive antimony-doped tin dioxide and micro-fabrication method Kololuoma T, Karkkainen AHO, Rantala JT Thin Solid Films, 408(1-2), 128, 2002 |
| 4 |
Negative tone hybrid sol-gel material for electron-beam lithography Rantala JT, Penner RS, Honkanen S, Vahakangas J, Fallahi M, Peyghambarian N Thin Solid Films, 345(2), 185, 1999 |
| 5 |
Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask Ayras P, Rantala JT, Levy R, Descour MR, Honkanen S, Peyghambarian H Thin Solid Films, 352(1-2), 9, 1999 |