검색결과 : 1건
No. | Article |
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1 |
Aqueous cleaning of sidewall redepositions formed by reactive ion etching of platinum Ranpura HM, Butler DH, Chang LH, Tracy CJ, Beaudoin SP Journal of the Electrochemical Society, 146(8), 3114, 1999 |
No. | Article |
---|---|
1 |
Aqueous cleaning of sidewall redepositions formed by reactive ion etching of platinum Ranpura HM, Butler DH, Chang LH, Tracy CJ, Beaudoin SP Journal of the Electrochemical Society, 146(8), 3114, 1999 |