화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Low-temperature dopant activation technology using elevated Ge-S/D structure
Takeuchi H, Ranade P, King TJ
Applied Surface Science, 224(1-4), 73, 2004
2 Observation of boron and arsenic mediated interdiffusion across germaniun/silicon interfaces
Ranade P, Takeuchi H, Subramanian V, King TJ
Electrochemical and Solid State Letters, 5(2), G5, 2002
3 Work function engineering of molybdenum gate electrode by nitrogen implantation
Ranade P, Takeuchi H, King TJ, Hu CM
Electrochemical and Solid State Letters, 4(11), G85, 2001