검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Hexamethyldisilazane vapor treatment of plasma damaged nanoporous methylsilsesquioxane films: Structural and electrical characteristics Rajagopalan T, Lahlouh B, Chari I, Othman MT, Biswas N, Toma D, Gangopadhyay S Thin Solid Films, 516(10), 3399, 2008 |
| 2 |
Investigation on hexamethyldisilazane vapor treatment of plasma-damaged nanoporous organosilicate films Rajagopalan T, Lahlouh B, Lubguban JA, Biswas N, Gangopadhyay S, Sun J, Huang DH, Simon SL, Toma D, Butler R Applied Surface Science, 252(18), 6323, 2006 |
| 3 |
Post treatments of plasma-enhanced chemical vapor deposited hydrogenated amorphous silicon carbide for low dielectric constant films Lahlouh B, Rajagopalan T, Biswas N, Sun J, Huang D, Simon SL, Lubguban JA, Gangopadhyay S Thin Solid Films, 497(1-2), 109, 2006 |
| 4 |
Formation of highly oriented GeBiSe films from the as-deposited amorphous state by annealing Rajagopalan T, Reddy GB Thin Solid Films, 377-378, 501, 2000 |
| 5 |
Effect of annealing rate on the crystallization process in Ge5Bi18Se77 films Rajagopalan T, Reddy GB Thin Solid Films, 353(1-2), 254, 1999 |