검색결과 : 3건
No. | Article |
---|---|
1 |
Profiling of Silicide Silicon Structures Using a Combination of the Spreading Resistance and Point-Contact Current-Voltage Methods Heddleson JM, Weinzierl SR, Hillard RJ, Raichoudhury P, Mazur RG Journal of Vacuum Science & Technology B, 12(1), 317, 1994 |
2 |
Detection of Anomalous Defect-Enhanced Diffusion Using Advanced Spreading Resistance Measurements and Analysis Weinzierl SR, Hillard RJ, Heddleson JM, Raichoudhury P, Mazur RG, Osburn CM Journal of Vacuum Science & Technology B, 12(1), 322, 1994 |
3 |
Accurate Profiling of Ultra-Shallow Implants with Mercury Gate Metal-Oxide-Semiconductor Capacitance-Voltage Ledudal R, Hillard RJ, Heddleson JM, Weinzierl SR, Raichoudhury P, Mazur RG Journal of Vacuum Science & Technology B, 12(1), 336, 1994 |