검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Electrical properties of cobalt and copper contamination in processed silicon Benton JL, Boone T, Jacobson DC, Silverman PJ, Rosamilia JM, Rafferty CS, Weinzierl S, Vu B Journal of the Electrochemical Society, 148(6), G326, 2001 |
| 2 |
Dose, energy, and ion species dependence of the effective plus factor for transient enhanced diffusion Hobler G, Pelaz L, Rafferty CS Journal of the Electrochemical Society, 147(9), 3494, 2000 |
| 3 |
Dopant dose loss at the Si-SiO2 interface Vuong HH, Rafferty CS, Eshraghi SA, Ning J, McMacken JR, Chaudhry S, McKinley J, Stevie FA Journal of Vacuum Science & Technology B, 18(1), 428, 2000 |
| 4 |
Front-end process simulation Rafferty CS Solid-State Electronics, 44(5), 863, 2000 |