검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Quantitative determination of dielectric thin-film properties on product wafers using infrared reflection-absorption spectroscopy Niemczyk TM, Zhang LZ, Haaland DM, Radigan KJ Journal of Vacuum Science & Technology A, 16(6), 3490, 1998 |
| 2 |
Quantitative-Analysis of Borophosphosilicate Glass-Films on Silicon Using Infrared External Reflection-Absorption Spectroscopy Franke JE, Zhang LZ, Niemczyk TM, Haaland DM, Radigan KJ Journal of Vacuum Science & Technology A, 13(4), 1959, 1995 |