검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reactive ion etching in CF4/O-2 gas mixtures for fabricating SiC devices Imaizumi M, Tarui Y, Sugimoto H, Tanimura J, Takami T, Ozeki T Materials Science Forum, 338-3, 1057, 2000 |
| No. | Article |
|---|---|
| 1 |
Reactive ion etching in CF4/O-2 gas mixtures for fabricating SiC devices Imaizumi M, Tarui Y, Sugimoto H, Tanimura J, Takami T, Ozeki T Materials Science Forum, 338-3, 1057, 2000 |