검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Langmuir probe measurements in a low pressure inductively coupled plasma used for diamond deposition Okada K, Komatsu S, Matsumoto S Journal of Vacuum Science & Technology A, 17(3), 721, 1999 |
| 2 |
Control of ion energy in a capacitively coupled reactive ion etcher Park HM, Garvin C, Grimard DS, Grizzle JW Journal of the Electrochemical Society, 145(12), 4247, 1998 |
| 3 |
Investigations in the sheath region of a radio frequency biased inductively coupled discharge Benck EC, Schwabedissen A, Gates A, Roberts JR Journal of Vacuum Science & Technology A, 16(1), 306, 1998 |
| 4 |
Ion energy distribution functions in inductively coupled radio-frequency discharges - Mixtures of Cl-2/BCl3/Ar Nichols CA, Woodworth JR, Hamilton TW Journal of Vacuum Science & Technology A, 16(6), 3389, 1998 |
| 5 |
Ion Distribution-Functions in Inductively-Coupled Radio-Frequency Discharges in Argon-Chlorine Mixtures Woodworth JR, Riley ME, Miller PA, Nichols CA, Hamilton TW Journal of Vacuum Science & Technology A, 15(6), 3015, 1997 |