검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Impedance transition and series resonance between bulk plasma and sheath in biased inductively coupled plasma Lee HC, Chung CW Thin Solid Films, 518(18), 5219, 2010 |
| No. | Article |
|---|---|
| 1 |
Impedance transition and series resonance between bulk plasma and sheath in biased inductively coupled plasma Lee HC, Chung CW Thin Solid Films, 518(18), 5219, 2010 |