화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Characterization of silicon oxynitride thin films by x-ray photoelectron spectroscopy
Shallenberger JR, Cole DA, Novak SW
Journal of Vacuum Science & Technology A, 17(4), 1086, 1999
2 Titanium Nitridation on Copper Surfaces
Russell SW, Rack MJ, Adams D, Alford TL, Levine TE, Nastasi M
Journal of the Electrochemical Society, 143(7), 2349, 1996
3 High-Temperature Local Oxidation of Silicon Field Isolation Morphological Characterization
Deleonibus S
Journal of the Electrochemical Society, 143(11), L259, 1996