검색결과 : 1건
No. | Article |
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1 |
Studies of ion bombardment in high density plasmas containing CF4 Olthoff JK, Wang YC Journal of Vacuum Science & Technology A, 17(4), 1552, 1999 |
No. | Article |
---|---|
1 |
Studies of ion bombardment in high density plasmas containing CF4 Olthoff JK, Wang YC Journal of Vacuum Science & Technology A, 17(4), 1552, 1999 |