검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Analysis of precursors for crystal growth of YBaCuO thin films in magnetron sputtering deposition Fukaya K, Sasaki K, Gao JS, Kimura T, Watanabe M, Inoue M, Fujimaki A, Sugai H Thin Solid Films, 517(8), 2762, 2009 |
| 2 |
Pressure dependence of radical densities in various gas discharges Kim MT Applied Surface Science, 245(1-4), 240, 2005 |
| 3 |
Radical densities in fluorocarbon/O-2 discharges - interpretation based on a simple plasma chemistry model Kim MT Applied Surface Science, 211(1-4), 285, 2003 |
| 4 |
Mechanism of C4F8 dissociation in parallel-plate-type plasma Hayashi H, Morishita S, Tatsumi T, Hikosaka Y, Noda S, Nakagawa H, Kobayashi S, Inoue M, Hoshino T Journal of Vacuum Science & Technology A, 17(5), 2557, 1999 |
| 5 |
Fluorinated amorphous carbon films for low permittivity interlevel dielectrics Theil JA Journal of Vacuum Science & Technology B, 17(6), 2397, 1999 |