검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
A Kalman filter-based R2R control system with parallel stochastic disturbance models for semiconductor manufacturing processes Kim H, Park JH, Lee KS Journal of Process Control, 24(12), 119, 2014 |
| 2 |
Run-to-run control of inductively coupled C2F6 plasma etching of SiO2: Multivariable controller design and numerical application Seo ST, Lee KS, Yang DR Korean Journal of Chemical Engineering, 23(2), 199, 2006 |