검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Sputter-etching characteristics of barium-strontium-titanate and bismuth-strontium-tantalate using a surface-wave high-density plasma reactor Stafford L, Margot J, Delprat S, Chaker M, Queney D Journal of Vacuum Science & Technology A, 20(2), 530, 2002 |