검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Ion-Assisted Low-Temperature (Less-Than-or-Equal-to-150 Degrees-C) Epitaxial-Growth of Tin on Cu by Reactive Magnetron Sputter-Deposition Ljungcrantz H, Benhenda S, Hakansson G, Ivanov I, Hultman L, Greene JE, Sundgren JE Thin Solid Films, 287(1-2), 87, 1996 |
| 2 |
Molecular-Beam Epitaxy of GaN(0001) Utilizing NH3 and/or Nhx+ Ions - Growth-Kinetics and Defect Structure Lee NE, Powell RC, Kim YW, Greene JE Journal of Vacuum Science & Technology A, 13(5), 2293, 1995 |
| 3 |
Low-Energy (5-Less-Than-E(I)Less-Than-100 eV), High-Brightness, Ultrahigh-Vacuum Ion-Source for Primary Ion-Beam Deposition - Applications for Al and Ge Kim YW, Petrov I, Ito H, Greene JE Journal of Vacuum Science & Technology A, 13(6), 2836, 1995 |
| 4 |
Mass and Energy-Resolved Detection of Ions and Neutral Sputtered Species Incident at the Substrate During Reactive Magnetron Sputtering of Ti in Mixed Ar+n2 Mixtures Petrov I, Myers A, Greene JE, Abelson JR Journal of Vacuum Science & Technology A, 12(5), 2846, 1994 |