검색결과 : 1건
No. | Article |
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1 |
Electric and pyroelectric properties of AIN thin films deposited by reactive magnetron sputtering on Si substrate Stan GE, Botea M, Boni GA, Pintilie I, Pintilie L Applied Surface Science, 353, 1195, 2015 |
No. | Article |
---|---|
1 |
Electric and pyroelectric properties of AIN thin films deposited by reactive magnetron sputtering on Si substrate Stan GE, Botea M, Boni GA, Pintilie I, Pintilie L Applied Surface Science, 353, 1195, 2015 |