검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Accurate depth profiling of dry oxidized SiGeC thin films by extended Full Spectrum ToF-SIMS Py M, Saracco E, Damlencourt JF, Barnes JP, Fabbri JM, Hartmann JM Applied Surface Science, 257(22), 9414, 2011 |
| 2 |
Low temperature boron and phosphorous doped SiGe for recessed and raised sources and drains Hartmann JM, Py M, Barnes JP, Previtali B, Batude P, Billon T Journal of Crystal Growth, 327(1), 68, 2011 |