검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Engineering structure and properties of hafnium oxide films by atomic layer deposition temperature Kukli K, Aarik J, Uustare T, Lu J, Ritala M, Aidla A, Pung L, Harsta A, Leskela M, Kikas A, Sammelselg V Thin Solid Films, 479(1-2), 1, 2005 |
| 2 |
Optical characterization of HfO2 thin films grown by atomic layer deposition Aarik J, Mandar H, Kirm M, Pung L Thin Solid Films, 466(1-2), 41, 2004 |