검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Pattern transfer on mask membranes Fisher AH, Engelstad RL, Lovell EG, Puisto DM Journal of Vacuum Science & Technology B, 16(6), 3572, 1998 |
| 2 |
Conductive polyaniline : Applications in x-ray mask making Lawliss MS, Rocque JM, Angelopoulos M, Puisto DM, Henry RW Journal of Vacuum Science & Technology B, 15(6), 2224, 1997 |
| 3 |
Predicting Inplane Distortion from Electron-Beam Lithography on X-Ray Mask Membranes Laird DL, Engelstad RL, Puisto DM, Acosta RE, Cummings KD, Johnson WA Journal of Vacuum Science & Technology B, 14(6), 4308, 1996 |
| 4 |
Multiple-Pass Writing Optimization for Proximity X-Ray Mask-Making Using Electron-Beam Lithography Puisto DM, Lawliss MS, Rocque JM, Kimmel KR, Hartley JG Journal of Vacuum Science & Technology B, 14(6), 4341, 1996 |