검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Simulation of the production of atomic hydrogen in a low-pressure-arc-discharge-based source Kagadei VA, Kozyrev AV, Proskurovsky DI, Osipov IV Journal of Vacuum Science & Technology A, 19(4), 1346, 2001 |
| 2 |
Investigation of the penetration of atomic hydrogen from the gas phase into SiO2/GaAs Kagadei VA, Nefyodtsev EV, Proskurovsky DI Journal of Vacuum Science & Technology A, 19(4), 1871, 2001 |
| 3 |
Production of shallow ion-implanted layers using rapid electron-beam annealing under the condition of transient-enhanced outdiffusion Kagadei VA, Proskurovsky DI Journal of Vacuum Science & Technology B, 18(1), 454, 2000 |
| 4 |
In situ cleaning of GaAs and AlxGa1-xAs surfaces and production of ohmic contacts using an atomic hydrogen source based on a reflected arc discharge Kagadei VA, Proskurovsky DI Journal of Vacuum Science & Technology A, 17(4), 1488, 1999 |
| 5 |
Pulsed electron-beam technology for surface modification of metallic materials Proskurovsky DI, Rotshtein VP, Ozur GE, Markov AB, Nazarov DS, Shulov VA, Ivanov YF, Buchheit RG Journal of Vacuum Science & Technology A, 16(4), 2480, 1998 |
| 6 |
Use of a new type of atomic hydrogen source for cleaning and hydrogenation of compound semiconductive materials Kagadei VA, Proskurovsky DI Journal of Vacuum Science & Technology A, 16(4), 2556, 1998 |