화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 On the temperature dependence of Na migration in thin SiO2 films during ToF-SIMS O-2(+) depth profiling
Krivec S, Detzel T, Buchmayr M, Hutter H
Applied Surface Science, 257(1), 25, 2010
2 Determination of the Lateral Spread of Xe Ions in Silicon-Nitride and Hydrated Silicon-Nitride Films by Oblique-Incidence Rutherford Backscattering
Wang KM, Qu BD, Shi BR, Lu F, Meng MQ, Wang ZL, Wang W, Ding PJ
Journal of Vacuum Science & Technology A, 14(1), 240, 1996