검색결과 : 3건
No. | Article |
---|---|
1 |
Studies on the Morphology of Al2O3 Thin-Films Grown by Atomic Layer Epitaxy Ritala M, Saloniemi H, Leskela M, Prohaska T, Friedbacher G, Grasserbauer M Thin Solid Films, 286(1-2), 54, 1996 |
2 |
Surface-Roughness Reduction in Atomic Layer Epitaxy Growth of Titanium-Dioxide Thin-Films Ritala M, Leskela M, Niinisto L, Prohaska T, Friedbacher G, Grasserbauer M Thin Solid Films, 249(2), 155, 1994 |
3 |
Development of Crystallinity and Morphology in Hafnium Dioxide Thin-Films Grown by Atomic Layer Epitaxy Ritala M, Leskela M, Niinisto L, Prohaska T, Friedbacher G, Grasserbauer M Thin Solid Films, 250(1-2), 72, 1994 |