화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Studies on the Morphology of Al2O3 Thin-Films Grown by Atomic Layer Epitaxy
Ritala M, Saloniemi H, Leskela M, Prohaska T, Friedbacher G, Grasserbauer M
Thin Solid Films, 286(1-2), 54, 1996
2 Surface-Roughness Reduction in Atomic Layer Epitaxy Growth of Titanium-Dioxide Thin-Films
Ritala M, Leskela M, Niinisto L, Prohaska T, Friedbacher G, Grasserbauer M
Thin Solid Films, 249(2), 155, 1994
3 Development of Crystallinity and Morphology in Hafnium Dioxide Thin-Films Grown by Atomic Layer Epitaxy
Ritala M, Leskela M, Niinisto L, Prohaska T, Friedbacher G, Grasserbauer M
Thin Solid Films, 250(1-2), 72, 1994