검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Damascene copper interconnects with polymer ILDs Price DT, Gutmann RJ, Murarka SP Thin Solid Films, 308-309, 523, 1997 |
| 2 |
Integration of Copper Multilevel Interconnects with Oxide and Polymer Interlevel Dielectrics Gutmann RJ, Chow TP, Lakshminarayanan S, Price DT, Steigerwald JM, You L, Murarka SP Thin Solid Films, 270(1-2), 472, 1995 |
| 3 |
Chemical-Mechanical Polishing of Copper with Oxide and Polymer Interlevel Dielectrics Gutmann RJ, Steigerwald JM, You L, Price DT, Neirynck J, Duquette DJ, Murarka SP Thin Solid Films, 270(1-2), 596, 1995 |