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| No. | Article |
|---|---|
| 1 |
Low temperature ZEP-520A development process for enhanced critical dimension realization in reactive ion etch etched polysilicon Wang H, Laws GM, Milicic S, Boland P, Handugan A, Pratt M, Eschrich T, Myhajlenko S, Allgair JA, Bunday B Journal of Vacuum Science & Technology B, 25(1), 102, 2007 |