검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Immersion patterning down to 27 nm half pitch Bloomstein TM, Fedynyshyn TH, Pottebaum I, Marchant MF, Deneault SJ, Rothschild M Journal of Vacuum Science & Technology B, 24(6), 2789, 2006 |
| 2 |
Contribution of photoacid generator to material roughness Fedynyshyn TH, Pottebaum I, Astolfi DK, Cabral A, Roberts J, Meagley R Journal of Vacuum Science & Technology B, 24(6), 3031, 2006 |