검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Metrology of scattering with angular limitation projection electron lithography masks Liddle JA, Blakey MI, Saunders T, Farrow RC, Fetter LA, Knurek CS, Kasica R, Novembre AE, Peabody ML, Tennant DM, Windt DL, Postek M Journal of Vacuum Science & Technology B, 15(6), 2197, 1997 |