검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Ultrahigh-Vacuum Chemically Assisted Ion-Beam Etching System with a 3-Grid Ion-Source Hryniewicz JV, Chen YJ, Hsu SH, Lee CH, Porkolab GA Journal of Vacuum Science & Technology A, 15(3), 616, 1997 |
| 2 |
Air-bridges, air-ramps, planarization, and encapsulation using pyrolytic photoresist in the fabrication of three-dimensional microstructures Porkolab GA, Chen YJ, Tabatabaei SA, Agarwala S, Johnson FG, King O, Dagenais M, Frizzell RE, Beard WT, Stone DR Journal of Vacuum Science & Technology B, 15(6), 1961, 1997 |
| 3 |
Etch-Mask of Pyrolytic-Photoresist Thin-Film for Self-Aligned Fabrication of Smooth and Deep Faceted 3-Dimensional Microstructures Porkolab GA, Hsu SH, Hryniewicz JV, Lin WH, Chen YJ, Agarwala S, Johnson FG, King O, Dagenais M, Stone DR Journal of Vacuum Science & Technology B, 14(6), 3650, 1996 |
| 4 |
Lithography Using Electron-Beam-Induced Etching of a Carbon-Film Wang D, Hoyle PC, Cleaver JR, Porkolab GA, Macdonald NC Journal of Vacuum Science & Technology B, 13(5), 1984, 1995 |
| 5 |
Self-Aligned Fabrication of Arrays of Back-to-Back External 45-Degrees Reflectors Integrated with Ridge-Wave-Guide Lasers for Surface-Emitting High-Power Semiconductor-Laser Sources in AlGaAs/GaAs Porkolab GA, Wolf ED Journal of Vacuum Science & Technology B, 11(6), 2552, 1993 |