검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Chemical vapor deposition of tungsten silicide (WSix) for high aspect ratio applications Sell B, Sanger A, Schulze-Icking G, Pomplun K, Krautschneider W Thin Solid Films, 443(1-2), 97, 2003 |
| 2 |
Improved Auger electron spectroscopy sputter depth profiling of W/WNx and WSix layers on Si substrates Goryachko A, Kruger D, Kurps R, Weidner G, Pomplun K Journal of Vacuum Science & Technology A, 19(5), 2174, 2001 |