검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Cleaning of Silicon Surfaces by Hydrogen Multipolar Microwave Plasma Excited by Distributed Electron-Cyclotron-Resonance Raynaud P, Pomot C Journal of Vacuum Science & Technology B, 12(2), 574, 1994 |
| No. | Article |
|---|---|
| 1 |
Cleaning of Silicon Surfaces by Hydrogen Multipolar Microwave Plasma Excited by Distributed Electron-Cyclotron-Resonance Raynaud P, Pomot C Journal of Vacuum Science & Technology B, 12(2), 574, 1994 |