검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Plasma-Surface Interactions in Plasma Catalysis Neyts EC Plasma Chemistry and Plasma Processing, 36(1), 185, 2016 |
| 2 |
Instantaneous cleaning of silicon substrates by mesoplasma for high-rate and low-temperature epitaxy Diaz JMA, Harima K, Kambara M, Yoshida T Thin Solid Films, 518(3), 976, 2009 |
| 3 |
Plasma surface interaction in PACVD and PVD systems during TiAlBN nanocomposite hard thin films deposition Avni R, Fried I, Raveh A, Zukerman I Thin Solid Films, 516(16), 5386, 2008 |