검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
F and Cl detection limits in secondary ion mass spectrometry measurements of Si and SiO2 samples Pivovarov AL, Guryanov GM Journal of Vacuum Science & Technology A, 28(5), 1181, 2010 |
| 2 |
Improved charge neutralization method for depth profiling of bulk insulators using O-2(+) primary beam on a magnetic sector SIMS instrument Pivovarov AL, Stevie FA, Griffis DP Applied Surface Science, 231-2, 786, 2004 |
| 3 |
Optimization of secondary ion mass spectrometry detection limit for N in SiC Pivovarov AL, Stevie FA, Griffis DP, Guryanov GM Journal of Vacuum Science & Technology A, 21(5), 1649, 2003 |