검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Effects of multilayer mask roughness on extreme ultraviolet lithography Deng YF, Pistor T, Neureuther AR Journal of Vacuum Science & Technology B, 20(1), 344, 2002 |
| 2 |
Extreme ultraviolet mask defect simulation: Low-profile defects Pistor T, Deng YF, Neureuther A Journal of Vacuum Science & Technology B, 18(6), 2926, 2000 |
| 3 |
Extreme ultraviolet mask defect simulation Pistor T, Neureuther A Journal of Vacuum Science & Technology B, 17(6), 3019, 1999 |