검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Carbonization and transition layer effects on 3C-SiC film residual stress Anzalone R, Litrico G, Piluso N, Reitano R, Alberti A, Fiorenza P, Coffa S, La Via F Journal of Crystal Growth, 473, 11, 2017 |
| 2 |
Wafer Cut Effect on Hetero-Epitaxial 3C-SiC Film for MEMS Application Anzalone R, Camarda M, Auditore A, Piluso N, Severino A, La Magna A, D'Arrigo G, La Via F Electrochemical and Solid State Letters, 15(6), H182, 2012 |
| 3 |
Stress fields analysis in 3C-SiC free-standing microstructures by micro-Raman spectroscopy Piluso N, Anzalone R, Camarda M, Severino A, D'Arrigo G, La Via F Thin Solid Films, 522, 20, 2012 |
| 4 |
Large area optical characterization of 3 and 4 inches 4H-SiC wafers Canino A, Piluso N, La Via F Thin Solid Films, 522, 30, 2012 |
| 5 |
Defect Influence on Heteroepitaxial 3C-SiC Young's Modulus Anzalone R, Camarda M, Canino A, Piluso N, La Via F, D'Arrigo D Electrochemical and Solid State Letters, 14(4), H161, 2011 |
| 6 |
Defect Influence on Heteroepitaxial 3C-SiC Young's Modulus (vol 14, H161, 2011) Anzalone R, Camarda M, Canino A, Piluso N, La Via F, D'Arrigo G Electrochemical and Solid State Letters, 14(7), S3, 2011 |
| 7 |
High-quality 6 inch (111) 3C-SiC films grown on off-axis (111) Si substrates Severino A, Bongiorno C, Piluso N, Italia M, Camarda M, Mauceri M, Condorelli G, Di Stefano MA, Cafra B, La Magna A, La Via F Thin Solid Films, 518, S165, 2010 |