검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of gas entry point on plasma chemistry, ion energy and deposited alumina thin films in filtered cathodic arc Rosen J, Persson POA, Ionescu M, Pigott J, McKenzie DR, Bilek MMM Plasma Chemistry and Plasma Processing, 27(5), 599, 2007 |