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| No. | Article |
|---|---|
| 1 |
Are extreme ultraviolet resists ready for the 32 nm node? Petrillo K, Wei Y, Brainard R, Denbeaux G, Goldfarb D, Koay CS, Mackey J, Montgomery W, Pierson W, Wallow T, Wood O Journal of Vacuum Science & Technology B, 25(6), 2490, 2007 |