검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma reactive ion etching of bulk ZnO single crystal and molecular beam epitaxy grown ZnO films Mehta M, Ruth M, Piegdon KA, Krix D, Nienhaus H, Meier C Journal of Vacuum Science & Technology B, 27(5), 2097, 2009 |