검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Wet-chemical etching of metals for advanced semiconductor technology nodes: Ru etching in acidic Ce4+ solutions Philipsen H, Mouwen N, Teck S, Monnens W, Le QT, Holsteyns F, Struyf H Electrochimica Acta, 306, 285, 2019 |
| 2 |
Immersion and electrochemical deposition of Ru on Si Philipsen H, Monnens W Electrochimica Acta, 274, 306, 2018 |
| 3 |
Nucleation and growth kinetics of electrodeposited Ni films on Si(100) surfaces Philipsen H, Jehoul H, Inoue F, Vandersmissen K, Yang L, Struyf H, van Dorp D Electrochimica Acta, 230, 407, 2017 |
| 4 |
Nucleation Kinetics of Electroless Cu Deposition on Ruthenium Using Glyoxylic Acid as a Reducing Agent Inoue F, Philipsen H, van der Veen MH, Van Huylenbroeck S, Armini S, Struyf H, Tanaka T Journal of the Electrochemical Society, 161(14), D768, 2014 |
| 5 |
Electroless Cu deposition on atomic layer deposited Ru as novel seed formation process in through-Si vias Inoue F, Philipsen H, Radisic A, Armini S, Civale Y, Leunissen P, Kondo M, Webb E, Shingubara S Electrochimica Acta, 100, 203, 2013 |
| 6 |
Electroless Copper Bath Stability Monitoring with UV-VIS Spectroscopy, pH, and Mixed Potential Measurements Inoue F, Philipsen H, Radisic A, Armini S, Civale Y, Shingubara S, Leunissen P Journal of the Electrochemical Society, 159(7), D437, 2012 |
| 7 |
Void-Free Filling of HAR TSVs Using a Wet Alkaline Cu Seed on CVD Co as a Replacement for PVD Cu Seed Armini S, El-Mekki Z, Vandersmissen K, Philipsen H, Rodet S, Honore M, Radisic A, Civale Y, Beyne E, Leunissen L Journal of the Electrochemical Society, 158(2), H160, 2011 |