검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Determination of the Dill parameters of thick positive resist for use in modeling applications Roeder G, Liu S, Aygun G, Evanschitzky P, Erdmann A, Schellenberger M, Pfitzner L Thin Solid Films, 519(9), 2978, 2011 |
| 2 |
E-MRS 1999 Spring Meeting, Strasbourg, June 1-4, 1999 - Preface Schmeisser D, Richter H, Pfitzner L, Prasad S Solid-State Electronics, 44(5), V, 2000 |
| 3 |
In situ spectroscopic ellipsometry for advanced process control in vertical furnaces Lehnert W, Berger R, Schneider C, Pfitzner L, Ryssel H, Stehle JL, Piel JP, Neumann W Thin Solid Films, 313-314, 442, 1998 |