검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Control of the radio-frequency wave form at the chuck of an industrial oxide-each reactor Berry L, Maynard H, Miller P, Moore T, Pendley M, Resta V, Sparks D, Yang QY Journal of Vacuum Science & Technology A, 18(6), 2806, 2000 |